2021
ACL
doi
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Monu Kaushik, César Leroy, Zixuan Chen, David Gajan, Elena Willinger, Christoph R.Müller, Franck Fayon, Dominique Massiot, Alexey Fedorov, Christophe Copéret, Anne Lesage, Pierre Florian Atomic-Scale Structure and Its Impact on Chemical Properties of Aluminum Oxide Layers Prepared by Atomic Layer Deposition on Silica Chemistry of Materials 33 3335–334 (2021) [view,doi,HAL]
|